Perfluoropropane 218 C3F8 Applications

Perfluoropropane (C3F8)

C3F8 is being introduced into the semiconductor PECVD process as alternative to CF4 and C2F6 with a utilisation factor of typically 56%.3 The use of perfluorinated gases and optimisation of these processes for existing equipment is preferred by the semiconductor industry as not-in-kind solutions are generally considered less feasible from a performance, safety and cost point of view.

Estimated European sales to semiconductor manufacturing companies are <1t for 1997. A typical emission rate without abatement would be of max. 44%; the CO2 equivalent emissions are estimated <0,01 Mt.