Perfluoromethane 14 CF4 Applications

Perfluoromethane (CF4):

Used by the semiconductor industry - CF4 is converted into radicals in plasma with a typical utilisation of 19%. The unconverted portion is intended to be reacted with off-gas treatment methods.

Estimated European sales to semiconductor manufacturing companies amount to <105t for 1997. Compared with an emission rate of max. 80%, the CO2 equivalent emissions are estimated as <0,5 Mt.